Chemical Adsorbents, JBE-SiH₄

Application Field

Removing of SiH₄, Ion Implant Process, Ashing/Etching Process, Epi Process, CVD Process, etc.

Characteristic

• Appearance & Size : Pellet (ø=3.0, more)
• Color : Purple
• Bulk density : 0.70~0.75g/cc
• Crush strength : > 2.0kg_f/cm²
• Upper temp. limit : < 100^oC
• Capacity : 0.6 L/L

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