Chemical Adsorbents, JBE-HCl, JBE-BCl3

Application Field

Removing of HCl, HF, HBr, BCl3 , Ion Implant Process, Ashing Process, Epi Process, CVD Process, etc.

Characteristic

  • Appearance & Size : Pellet (ø=4.0, more)
  • Color : Brown
  • Bulk density : 0.6~0.7g/cc
  • Crush strength : > 10kgf/cm2
  • Upper temp. limit : < 100oC
  • Capacity : 82.9 L/L

Appearance

Appearance

Mechanism

GAS Mechanism TLV (ppm)
BCl3 BCl3 + 3MOH → 3MCl + B(OH)3 5
BCl3 + 3MO(OH) → 3MOCl + B(OH)
HBr 2HBr + M(OH)2 → MBr2 + 2H2O 3
HCl 3HCl + MO(OH) → MCl3 + 2H2O 5
HF 6HF + M2O3 → 2MF3 + 3H2O 3
SiH4 SiH4 + 2MOH → M2Si + 2H2O + H2 5