Chemical Adsorbents, JBE-Cl2

Application Field

Removing of Cl2, F2, Ion Implant Process, Ashing Process, Epi Process, CVD Process, etc.

Characteristic

  • Appearance & Size : Pellet (ø=2.2, more)
  • Color : White
  • Bulk density : 0.6~0.7g/cc
  • Crush strength : > 3.0kgf/cm2
  • Upper temp. limit : < 100oC
  • Capacity : 28.4~30.7 L/L

Appearance

Appearance

Mechanism

GAS Mechanism TLV (ppm)
Cl2 Cl2 + 2MOH → 2MCl + H2O + 1/2O2 1
Cl2 + M(OH)2 → MCl2 + H2O + 1/2O2