Chemical Adsorbents, JBE-Amines
Application Field
Removing of NH3, TMA, Amino-silane, Diffusion Process, CVD Process, etc.
Characteristic
- Appearance & Size : Pellet (ø=4.0, more)
- Color : Light brown
- Bulk density : 0.8g/cc
- Crush strength : > 4.0kgf/cm2
- Upper temp. limit : < 100oC
- Capacity : 7.5~12.5 L/L
Appearance
Mechanism
Mechanism
GAS |
Mechanism |
TLV (ppm) |
NH3 |
4NH3 + MSO4 → M(NH3)4SO4 |
25 |